• In-line production plant for the hydrogen plasma treatment of silicon coats on glass substrates


• Module size: Up to 1.3 m x 1.1 m/li>
  
• High plasma density at simultaneously low ion energy for a damage-free process through the use of microwave-excited remote plasma sources/li>
  

Solar cells from the roll

Modularly structured plants can be used for the roll-to-roll coating of flexible substrates such as tapes and foils for the manufacture of thin-film solar cells in the field of research & development, in the pilot operation and in the small-scale production.

The processing width can be varied between 10 mm and 300 mm. The plants can be equipped with various PVD technologies such as magnetron sputtering and electron beam evaporation for the deposition of CIS/CIGS multilayer coating structures as well as with PECVD coating sources for the deposition of microcrystalline silicon coatings or silicon-based coatings (SiN, SiO, SiC)