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01 High Tech for Surfaces
 
 
Innovative Products and Technologies for Future-Oriented Applications
 
     
Nano Dot Formation by Ion Beam Treatment




  • Surface modification of AIIIBV semiconductor materials (InP, GaSb) by ion beam treatment

  • Formation of self-organizing crystalline surface structures in the nanometer range (nano dots) in dependence on ion beam angle of incidence, substrate rotation and process temperature





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Entrepreneur
des Jahres®
Winner 2009

Nominated for the
World Entrepreneur
of the Year 2010

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16.09.2010
Anniversary "20 Years of AIS Automation Dresden"
 
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