 |
| Structure
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|
 |
Roth & Rau AG |
|
 |
|
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|
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|
|
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|
| Dünnschicht Solar GmbH |
|
100% |
|
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|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
| Roth & Rau Microsys. GmbH |
|
100% |
|
|
|
|
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|
|
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|
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|
| CTF Solar GmbH |
|
100% |
|
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|
|
|
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|
|
| Shanghai Trading Co. Ltd. |
|
100% |
|
|
|
|
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|
| Singapore Pte. Ltd. |
|
100% |
|
|
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|
|
|
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| Korea Co. Ltd. |
|
100% |
|
|
|
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|
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|
|
|
|
|
|
| Switzerland AG |
|
100% |
|
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|
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|
| Australia Pty Ltd. |
|
100% |
|
|
|
|
|
|
|
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|
|
|
|
|
|
| USA Inc. |
|
100% |
|
|
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|
|
|
|
|
| India Pvt. Ltd. |
|
100% |
|
|
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 |
 |
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| |
|
01 |
High Tech for Surfaces
|
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| |
 |
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Innovative Products and Technologies for Future-Oriented Applications |
|
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| |
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GaAlN structures (courtesy of University Stuttgart)
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AIIIBV semiconductor materials – CAIBE (Chemically Assisted Ion Beam Etching)
- CAIBE of GaAs, GaN, GaAlN, lnP and similar materials
- Chlorine chemistry
- Adjustable and smooth surfaces
- Typical etching rates for GaN 20...30 nm/min.
|
 Topic
- DIBS (Dual Ion Beam Sputtering)
- Periodicity: 6.7 nm
- Smooth surfaces (RMS: 0.17 nm)
- In-situ process control by means of ellipsometry and reflectometry
|
Topic
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 |
|
 |
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Entrepreneur
des Jahres® |
|
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Winner 2009
Nominated for the
World Entrepreneur
of the Year 2010
official
site
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 |
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Events |
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16.09.2010 |
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Anniversary "20 Years of AIS Automation Dresden"
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